RF MEMS Planar Solenoidal Inductor with Wide Tunability

Publication Information

Title

Japanese:
English:	RF MEMS Planar Solenoidal Inductor with Wide Tunability

Author

Japanese:	白根篤史, 伊藤浩之, 石原昇, 益一哉.
English:	Atsushi Shirane, Hiroyuki Ito, Noboru Ishihara, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:	Advanced Metallization Conference (AMC) 2011

Volume, Number, Page

Published date

Oct. 4, 2011

Publisher

Japanese:
English:	Advanced Metallization Conference (AMC)

Conference name

Japanese:
English:	Advanced Metallization Conference (AMC) 2011

Conference site

Japanese:
English:	San Diego, California