Plasma Behavior of Laser Assisted Sn Discharge EUV Source

Publication Information

Title

Japanese:
English:	Plasma Behavior of Laser Assisted Sn Discharge EUV Source

Author

Japanese:	朱秋石, 山田淳三郎, 岸望, 細貝知直, 渡邊正人, 沖野晃俊, 堀田栄喜.
English:	Qiushi Zhu, Junzaburo Yamada, Nozomu Kishi, Tomonao Hosokai, MASATO WATANABE, AKITOSHI OKINO, EIKI HOTTA.

Language

English

Journal/Book name

Japanese:	平成21年電気学会全国大会
English:

Volume, Number, Page

1-185

Published date

Mar. 2009

Publisher

Japanese:	電気学会
English:

Conference name

Japanese:	平成21年電気学会全国大会
English:

Conference site

Japanese:	北海道札幌
English: