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Publication Information
Title
Japanese:
English:
Tribological Properties of Amorphous Boron Nitride Films Prepared by Nanopulse Plasma CVD
Author
Japanese:
齊藤 雅典
,
安原 鋭幸
,
村上 碩哉
,
大竹 尚登
.
English:
Masanori Saito
,
Toshiyuki Yasuhara
,
Hiroya Murakami
,
Naoto Ohtake
.
Language
English
Journal/Book name
Japanese:
English:
Journal of Solid Mechanics and Materials Engineering
Volume, Number, Page
Vol. 3 pp. 217-226
Published date
2009
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
©2007
Tokyo Institute of Technology All rights reserved.