Deposition of TI-DLC Films by Arc-Glow Hybrid Plasma CVD

Publication Information

Title

Japanese:
English:	Deposition of TI-DLC Films by Arc-Glow Hybrid Plasma CVD

Author

Japanese:	安原鋭幸, N. Taniguchi, H. Momose, 大竹尚登, J. V. R. Heberlein.
English:	T. Yasuhara, N. Taniguchi, H. Momose, N. Ohtake, J. V. R. Heberlein.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. 208

Published date

2007

Publisher

Japanese:
English:	Abstract of Int. Conf. New Diamond and Nano Carbons

Conference name

Japanese:
English:	Int. Conf. New Diamond and Nano Carbons

Conference site

Japanese:
English: