Tribological Properties of Amorphous Boron Nitride Films Prepared by Nanopulse Plasma CVD

Publication Information

Title

Japanese:
English:	Tribological Properties of Amorphous Boron Nitride Films Prepared by Nanopulse Plasma CVD

Author

Japanese:	齊藤雅典, 安原鋭幸, 村上碩哉, 大竹尚登.
English:	Masanori Saito, Toshiyuki Yasuhara, Hiroya Murakami, Naoto Ohtake.

Language

English

Journal/Book name

Japanese:
English:	Proc. 3rd Int. Conf. Materials and Processing

Volume, Number, Page

Vol. 1 MSEC/ICM&P 72550-1~72550-7

Published date

2008

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: