Synthesis and Characterization of Zinc-Doped Amorphous Carbon Films by Plasma-Assisted Organometallic Chemical Vapor Deposition

Publication Information

Title

Japanese:
English:	Synthesis and Characterization of Zinc-Doped Amorphous Carbon Films by Plasma-Assisted Organometallic Chemical Vapor Deposition

Author

Japanese:	赤坂大樹, Koji INAZU, 大竹尚登.
English:	Hiroki AKASAKA, Koji INAZU, Naoto OHTAKE.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Vol. 47 No. 3 pp. 1694-1698

Published date

2008

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI