Ultraprecision Machining System for Fabricating Nano-Devices

Publication Information

Title

Japanese:
English:	Ultraprecision Machining System for Fabricating Nano-Devices

Author

Japanese:	M.Takahashi, 吉岡勇人, 新野秀憲.
English:	M.Takahashi, H.Yoshioka, H.Shinno.

Language

English

Journal/Book name

Japanese:
English:	Proceedings of the 9th International Conference of the euspen, June 2nd-5th, 2009, San Sebastian, Spain

Volume, Number, Page

Vol. 1 pp. 228-231

Published date

June 2009

Publisher

Japanese:
English:

Conference name

Japanese:
English:	the 9th International Conference of the euspen

Conference site

Japanese:
English:	San Sebastian, Spain