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Title
Japanese:パルス真空アーク蒸着法による炭化タングステン膜の合成 
English: 
Author
Japanese: 相澤孝一, 平田敦.  
English: Kouichi Aizawa, ATSUSHI HIRATA.  
Language Japanese 
Journal/Book name
Japanese:2009年度精密工学会春季大会学術講演会講演論文集 
English: 
Volume, Number, Page         pp. 685-686
Published date Mar. 2009 
Publisher
Japanese: 
English: 
Conference name
Japanese:2009年度精密工学会春季大会学術講演会 
English: 
Conference site
Japanese:中央大学後楽園キャンパス，東京 
English: 

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