Experimental Study for High Efffective Mobility with directly deposited HfO2/La2O3 MOSFET

Publication Information

Title

Japanese:
English:	Experimental Study for High Efffective Mobility with directly deposited HfO2/La2O3 MOSFET

Author

Japanese:	川那子高暢, 宋在烈, 角嶋邦之, パールハットアヘメト, 筒井一生, 杉井信之, 服部健雄, 岩井洋.
English:	Takamasa Kawanago, Jaeyeol Song, Kuniyuki KAKUSHIMA, Ahmet Parhat, KAZUO TSUTSUI, Nobuyuki Sugii, takeo hattori, HIROSHI IWAI.

Language

English

Journal/Book name

Japanese:
English:	INFOS2009

Volume, Number, Page

Vol. 86 pp. 1629-1631

Published date

June 2009

Publisher

Japanese:
English:

Conference name

Japanese:
English:	INFOS2009, Microelectronic Engineering

Conference site

Japanese:
English:	Cambridege University, UK