Electrical characterization of directly deposited La-Sc oxides complex for gate insulator application

Publication Information

Title

Japanese:
English:	Electrical characterization of directly deposited La-Sc oxides complex for gate insulator application

Author

Japanese:	川那子高暢, 舘喜一, 宋在烈, 角嶋邦之, パールハットアヘメト, 筒井一生, 杉井信之, 服部健雄, 岩井洋.
English:	Takamasa Kawanago, Kiichi Tachi, Jaeyeol Song, Kuniyuki KAKUSHIMA, Ahmet Parhat, KAZUO TSUTSUI, Nobuyuki Sugii, takeo hattori, HIROSHI IWAI.

Language

English

Journal/Book name

Japanese:
English:	Microelectronic Engineering

Volume, Number, Page

Vol. 84 pp. 2335-2338

Published date

2007

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI