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Title
Japanese: 
English:Oxygen sensitivity of perovskite-type dielectric thin films 
Author
Japanese: 原亨, 石黒隆, 脇谷尚樹, 篠崎和夫.  
English: Toru Hara, Takashi Ishiguro, Naoki Wakiya, Kazuo Shinozaki.  
Language English 
Journal/Book name
Japanese: 
English:Mater. Sci. and Eng. B 
Volume, Number, Page Vol. 161    No. 1-3    pp. 142-145
Published date Feb. 2009 
Publisher
Japanese: 
English:Elsevier 
Conference name
Japanese: 
English:The 2nd International Conference on the Science and Technology for Advanced Ceramics (STAC-II) 
Conference site
Japanese: 
English: 
Official URL http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6TXF-4VJ4B6K-2&_user=126251&_coverDate=04%2F15%2F2009&_rdoc=32&_fmt=high&_orig=browse&_srch=doc-info(%23toc%235589%232009%23998389998%231130187%23FLA%23display%23Volume)&_cdi=5589&_sort=d&_docanchor=&_ct=46&_acct=C000010218&_version=1&_urlVersion=0&_userid=126251&md5=04dae4b5576b8b6929852deb7abbbea0
 
DOI https://doi.org/10.1016/j.mseb.2009.01.012
Abstract We have considered perovskite-type dielectric materials as promising candidates for use as highly sensitive oxygen sensors because of the indispensable interaction between ionic polarization in perovskites and adsorbed oxygen on the perovskite surface. In this study, a gas calibration system equipped with a ZrO2-based oxygen pump (SIOC-200C, STLAB, Japan) was used. Among the materials studied, Cr:SrTiO3 shows sufficient sensitivity to detect residual oxygen in helium ambient at ppb levels. In contrast to Cr:SrTiO3, Cr:BaTiO3 shows no oxygen sensitivity. The merits of Cr:SrTiO3 might be attributed to the coexistence of large and small polarons. Perovskite-based sensor is expected to provide a solution for real-time monitoring of residual oxygen during semiconductor manufacturing.

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