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Title
Japanese:実は奥深いナノインプリント技術 
English:Nanoimprint lithography is profound! 
Author
Japanese: 斉藤卓志.  
English: Takushi Saito.  
Language Japanese 
Journal/Book name
Japanese:精密工学会誌 
English:Journal of the Japan Society for Precision Engineering 
Volume, Number, Page Vol. 75    No. 8    pp. 958-961
Published date Aug. 2009 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
DOI https://doi.org/10.2493/jjspe.75.958

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