微細形状転写プロセスにおけるスタンパと溶融ポリマーとの粘着効果

Publication Information

Title

Japanese:	微細形状転写プロセスにおけるスタンパと溶融ポリマーとの粘着効果
English:	Adhesion Effects between a Molten Polymer and a Stamper in a Transcription Process for Fine Patterns

Author

Japanese:	伊東宏, 佐藤勲, 斉藤卓志, 焼本和利.
English:	Hiroshi Ito, Isao Satoh, Takushi Saito, Kazutoshi Yakemoto.

Language

Japanese

Journal/Book name

Japanese:	成形加工
English:	Seikei-Kakou

Volume, Number, Page

Vol. 21 No. 8 pp. 499-509

Published date

July 2009

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI