On-chip high-Q spiral Cu inductors embedded in wafer-level chip-scale package for silicon RF application

Publication Information

Title

Japanese:
English:	On-chip high-Q spiral Cu inductors embedded in wafer-level chip-scale package for silicon RF application

Author

Japanese:	Kazuhisa Itoi, Masakazu Sato, Hiroshi Abe, 菅原弘雄, 伊藤浩之, 岡田健一, 益一哉, Tatsuya Ito.
English:	Kazuhisa Itoi, Masakazu Sato, Hiroshi Abe, Hirotaka Sugawara, Hiroyuki Ito, Kenichi Okada, Kazuya Masu, Tatsuya Ito.

Language

English

Journal/Book name

Japanese:
English:	IEEE MTT-S International Microwave Symposium

Volume, Number, Page

Vol. 1 pp. 197-200

Published date

June 2004

Publisher

Japanese:
English:

Conference name

Japanese:
English:	IEEE MTT-S International Microwave Symposium

Conference site

Japanese:
English:	Texas, USA