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Title
Japanese:パルスプラズマＣＶＤ法によるＤＬＣ成膜時のパルス周波数が膜中水素量に及ぼす影響 
English: 
Author
Japanese: 藤本真司, 赤坂大樹, 鈴木常生, 大竹尚登, 高井治.  
English: 藤本真司, Hiroki Akasaka, 鈴木常生, NAOTO OHTAKE, Osamu Takai.  
Language Japanese 
Journal/Book name
Japanese:第70回応用物理学会学術講演会講演予稿集 
English: 
Volume, Number, Page     No. 2    pp. 530
Published date Sept. 2009 
Publisher
Japanese:応用物理学会 
English: 
Conference name
Japanese:第70回応用物理学会学術講演会 
English: 
Conference site
Japanese:富山大学 
English: 

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