Study of air-suspended RF MEMS inductorconfigurations for realizing large inductancevariations

Publication Information

Title

Japanese:
English:	Study of air-suspended RF MEMS inductorconfigurations for realizing large inductancevariations

Author

Japanese:	水落裕, 天川修平, 石原昇, 益一哉.
English:	Yutaka Mizuochi, Shuhei Amakawa, Noboru Ishihara, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:	Proceedings of the Argentine School of Micro-Nanoelectronics, Technology and Applications 2009

Volume, Number, Page

pp. 50-55

Published date

Oct. 2009

Publisher

Japanese:	IEEE
English:	Argentine School of Micro-Nanoelectronics, Technology and Applications 2009

Conference name

Japanese:
English:	Argentine School of Micro-Nanoelectronics, Technology and Applications 2009

Conference site

Japanese:
English:	Bariloche, Argentina

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