MEMS inductor configurations with shields for achieving large inductance variations

Publication Information

Title

Japanese:
English:	MEMS inductor configurations with shields for achieving large inductance variations

Author

Japanese:	水落裕, 天川修平, 石原昇, 益一哉.
English:	Yutaka Mizuochi, Shuhei Amakawa, Noboru Ishihara, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:	Advanced Metallization Conference 2009

Volume, Number, Page

pp. 59-60

Published date

Oct. 2009

Publisher

Japanese:
English:	Advanced Metallization Conference

Conference name

Japanese:
English:	Advanced Metallization Conference 2009

Conference site

Japanese:
English:	Baltimore, Maryland, USA