A Newly Developed X-Y Planer Nano-Motion Table System with Large Travel Ranges

Publication Information

Title

Japanese:
English:	A Newly Developed X-Y Planer Nano-Motion Table System with Large Travel Ranges

Author

Japanese:	Yugo KURIHASHI, 澤野宏, 吉岡勇人, 新野秀憲.
English:	Yugo KURIHASHI, Hiroshi SAWANO, Hayato YOSHIOKA, Hidenori SHINNO.

Language

English

Journal/Book name

Japanese:
English:	Proceedings of the 5th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)

Volume, Number, Page

Vol. 5 pp. 187-190

Published date

Dec. 2009

Publisher

Japanese:
English:	The Japan Society of Mechanical Engineers(JSME)

Conference name

Japanese:
English:	The 5th International Conference on Leading Edge Manufacturing in 21st Century

Conference site

Japanese:
English:	December 2-4, 2009, Osaka University Convention Center, Japan