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Title
Japanese: 
English:Integrated 3D silicon electrodes for electrochemical sensing in microfluidic environments 
Author
Japanese: 山本貴富喜.  
English: Takatoki Yamamoto.  
Language English 
Journal/Book name
Japanese: 
English:IEEE Sensors Jurnal 
Volume, Number, Page Vol. 8    No. 5    pp. 548-557
Published date May 2008 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
Abstract A microtechnology allowing the integration of thin metal electrodes and three dimensional highly doped bulk silicon electrodes on a hybrid PDMS/glass fluidic microchip has been developed. The fabrication involved anodic bonding of a silicon wafer onto glass substrate, deep reactive ion etching of 3-D bulk silicon electrodes, and plasma bonding of a PDMS microfluidic structure on a silicon/gold/glass substrate. The devices realized using this technology have been used for electrical impedance characterization of chemical and biological material. Microdevices with typical dimensions of hundreds of micrometers have been fabricated and tested in the determination of the conductivity of NaCl solutions. Smaller sensors, with critical dimensions under 10 m, have been achieved for single-cell characterization. Human hepatocellular liver carcinoma cells have been introduced in the microimpedance sensors. Measurements show the interfacial relaxation of the cellular membrane in the Hz range. It is expected that other electrochemical sensors and electrokinetic actuators can benefit from this technology.

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