厚膜レジストSU-8 微小円柱パターン－Si 基板間の接合強度に及ぼすアスペクト比の影響

Publication Information

Title

Japanese:	厚膜レジストSU-8 微小円柱パターン－Si 基板間の接合強度に及ぼすアスペクト比の影響
English:	Effect of Aspect Ratio on Adhesive Strength between Microsized SU-8 Cylinder and Si Substrate

Author

Japanese:	石山千恵美, 柴田曉伸, 曽根正人, 肥後矢吉.
English:	CHIEMI ISHIYAMA, Akinobu Shibata, Masato Sone, YAKICHI HIGO.

Language

Japanese

Journal/Book name

Japanese:	第５８回高分子討論会予稿集
English:	Polymer preprints, Japan

Volume, Number, Page

Vol. 58 No. 2 1L1-17

Published date

Sept. 2009

Publisher

Japanese:
English:

Conference name

Japanese:	第５８回高分子討論会
English:

Conference site

Japanese:
English: