Fundamental Study on Discharge Characteristics   of Nitrogen-Rare Gas Microwave Plasma

Publication Information

Title

Japanese:
English:	Fundamental Study on Discharge Characteristics of Nitrogen-Rare Gas Microwave Plasma

Author

Japanese:	桑野慧, 根津篤, 松浦治明, 赤塚洋.
English:	Kei Kuwano, Atsushi Nezu, Haruaki Matsuura, Hiroshi Akatsuka.

Language

English

Journal/Book name

Japanese:
English:	Proc. The 6th Asia-Pacific International Symposium on the Basic and Application of Plasma Technology

Volume, Number, Page

pp. 207-210

Published date

Dec. 2009

Publisher

Japanese:
English:	Minghsin University of Science and Technology

Conference name

Japanese:
English:	The 6th Asia-Pacific International Symposium on the Basic and Application of Plasma Technology

Conference site

Japanese:
English:	Hsinchu, Taiwan, R.O.C.