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Title
Japanese:Heガスを用いた磁界圧着形マグネトロンスパッタ法によるa-Si薄膜の作製 
English: 
Author
Japanese: 中川茂樹.  
English: SHIGEKI NAKAGAWA.  
Type
Type:Thesis (Master) 
Country: 
Language  
Organization name 金沢大学 
Report number  
Conferred date 1985/--/-- 
Judge  

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