Surface Modification of Thin Dielectric Materials by Compact Theta-Pinch Plasma

Publication Information

Title

Japanese:
English:	Surface Modification of Thin Dielectric Materials by Compact Theta-Pinch Plasma

Author

Japanese:	竹内希, 安岡康一, 石井彰三.
English:	Nozomi Takeuchi, Koichi Yasuoka, Shozo Ishii.

Language

English

Journal/Book name

Japanese:
English:	2005 IEEE International Conference of Plasma Science

Volume, Number, Page

1P73

Published date

June 2005

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2005 IEEE International Conference of Plasma Science

Conference site

Japanese:
English:	Monterey, California