Low Temperature Oxidation of Si Using Novel Ceramic Atomic Oxygen Source

Publication Information

Title

Japanese:
English:	Low Temperature Oxidation of Si Using Novel Ceramic Atomic Oxygen Source

Author

Japanese:	千葉哲也, 神谷利夫, 細野秀雄, 林克郎.
English:	Tetsuya Chiba, Toshio Kamiya, Hideo Hosono, Katsuro Hayashi.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 2009

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The Third International Conference on the Science and Technology for Advanced Ceramics (STAC-3)

Conference site

Japanese:
English:	Mielparque Yokohama (Yokohama)