Japanese
Home
Search
Horizontal Search
Publication Search
( Advanced Search )
Patent Search
( Advanced Search )
Research Highlight Search
( Advanced Search )
Researcher Search
Search by Organization
Support
FAQ
T2R2 User Registration
Doctoral thesis registration
Support/Contact
About T2R2
What's T2R2?
Operation Guidance
Leaflets
About file disclosure
Related Links
Tokyo Tech
STAR Search
NII IR Program
Home
>
Help
Publication Information
Title
Japanese:
English:
Selection of Rare Earth Silicate with SrO Capping for EOT Scaling below o.5 nm
Author
Japanese:
角嶋邦之
,
岡本晃一
,
小柳友常
,
舘喜一
,
幸田みゆき
,
川那子高暢
,
宋在烈
,
パールハットアヘメト
,
筒井一生
,
杉井信之
,
服部健雄
,
岩井洋
.
English:
Kuniyuki KAKUSHIMA
,
Koichi Okamoto
,
Tomotsune Koyanagi
,
Kiichi Tachi
,
Miyuki Kouda
,
Takamasa Kawanago
,
Jaeyeol Song
,
Ahmet Parhat
,
KAZUO TSUTSUI
,
Nobuyuki Sugii
,
takeo hattori
,
HIROSHI IWAI
.
Language
English
Journal/Book name
Japanese:
English:
Volume, Number, Page
p. 403
Published date
Sept. 2009
Publisher
Japanese:
English:
Conference name
Japanese:
English:
ESSDERC 2009, 39th European Solid-State Device Research Conference
Conference site
Japanese:
English:
Athens, Greece
©2007
Tokyo Institute of Technology All rights reserved.