Control and Confinement of Discharge-pumped-plasma for Efficient Extreme Ultraviolet Source

Publication Information

Title

Japanese:
English:	Control and Confinement of Discharge-pumped-plasma for Efficient Extreme Ultraviolet Source

Author

Japanese:	堀岡一彦, 志甫諒, 堀田栄喜, 河村徹, 中島充夫, MASNAVI MAJID, 沖野晃俊, 渡邊正人, A. Kikuchi, K. Takahashi.
English:	K. Horioka, M.Shiho, E.Hotta, T. Kawamura, M. Nakajima, M. Masnavi, A.Okino, M.Watanabe, A. Kikuchi, K. Takahashi.

Language

English

Journal/Book name

Japanese:
English:	The Papers of Joint Technical Meeting on Plasma Science and Technology and Pulsed Power Technology, IEE Japan

Volume, Number, Page

PPT-06-50 pp. 71-74

Published date

Aug. 2006

Publisher

Japanese:
English:	The Institute of Electrical Engineers of Japan

Conference name

Japanese:
English:	3rd Japan-US Symposium on Pulsed Power and Plasma Applications

Conference site

Japanese:
English: