Focused Ion Beam Machining

Publication Information

Title

Japanese:
English:	Focused Ion Beam Machining

Author

Japanese:	Aravindan Sivanandam, P.V.Rao, 吉野雅彦.
English:	Aravindan Sivanandam, P.V.Rao, Masahiko Yoshino.

Language

English

Journal/Book name

Japanese:
English:	Introduction to Micromachining (Editor V.K.Jain)

Volume, Number, Page

pp. 10.1-10.18

Published date

Nov. 2009

Publisher

Japanese:
English:	Naroza

Conference name

Japanese:
English:

Conference site

Japanese:
English: