Diagnostics of Electron Temperature of Low-Pressure Discharge Nitrogen Plasma by Optical Emission Spectroscopy

Publication Information

Title

Japanese:	発光分光計測による低気圧放電窒素プラズマの電子温度診断
English:	Diagnostics of Electron Temperature of Low-Pressure Discharge Nitrogen Plasma by Optical Emission Spectroscopy

Author

Japanese:	柴田智彦, 根津篤, 赤塚洋.
English:	Tomohiko Shibata, Atsushi Nezu, Hiroshi Akatsuka.

Language

English

Journal/Book name

Japanese:	第27回「プラズマプロセシング研究会」(SPP27)プロシーディングス
English:	Proceedings 27th Symposium on Plasma Processing

Volume, Number, Page

pp. 141-142

Published date

Feb. 2010

Publisher

Japanese:	社団法人応用物理学会プラズマエレクトロニクス分科会
English:	Division of Plasma Electronics, The Japan Society of Applied Physics

Conference name

Japanese:	第27回「プラズマプロセシング研究会」(SPP27)
English:	The 27th Symposium on Plasma Processing

Conference site

Japanese:	横浜市開港記念館
English:	Port Opening Memorial Hall, Yokohama