Diagnostics of oxygen-rare gas mixed plasmas excited by microwave discharge

Publication Information

Title

Japanese:	マイクロ波放電励起による酸素-希ガス混入プラズマの分光診断
English:	Diagnostics of oxygen-rare gas mixed plasmas excited by microwave discharge

Author

Japanese:	高井渉, 根津篤, 松浦治明, 赤塚洋.
English:	Wataru Takai, Atsushi Nezu, Haruaki Matsuura, Hiroshi Akatsuka.

Language

English

Journal/Book name

Japanese:	第27回「プラズマプロセシング研究会」(SPP27)プロシーディングス
English:	Proceedings 27th Symposium on Plasma Processing

Volume, Number, Page

pp. 175-176

Published date

Feb. 2010

Publisher

Japanese:	社団法人応用物理学会プラズマエレクトロニクス分科会
English:	Division of Plasma Electronics, The Japan Society of Applied Physics

Conference name

Japanese:	第27回「プラズマプロセシング研究会」(SPP27)
English:	The 27th Symposium on Plasma Processing

Conference site

Japanese:	横浜市開港記念館
English:	Port Opening Memorial Hall, Yokohama