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Publication Information
Title
Japanese:
窒素-希ガス混合マイクロ波プラズマの放電特性に関する基礎研究
English:
Fundamental Study on Discharge Characteristics of Nitrogen-Rare Gas Microwave Plasma
Author
Japanese:
桑野慧
,
根津篤
,
松浦治明
,
赤塚洋
.
English:
Kei Kuwano
,
Atsushi Nezu
,
Haruaki Matsuura
,
Hiroshi Akatsuka
.
Language
English
Journal/Book name
Japanese:
第27回「プラズマプロセシング研究会」(SPP27)プロシーディングス
English:
Proceedings 27th Symposium on Plasma Processing
Volume, Number, Page
pp. 177-178
Published date
Feb. 2010
Publisher
Japanese:
社団法人 応用物理学会 プラズマエレクトロニクス分科会
English:
Division of Plasma Electronics, The Japan Society of Applied Physics
Conference name
Japanese:
第27回「プラズマプロセシング研究会」(SPP27)
English:
The 27th Symposium on Plasma Processing
Conference site
Japanese:
横浜市開港記念館
English:
port Opening Memorial Hall, Yokohama
©2007
Tokyo Institute of Technology All rights reserved.