Development of a Secondary Electron Emission Gun and Its Application to VOC Treatment

Publication Information

Title

Japanese:	パルス二次電子銃の開発とVOC分解への応用
English:	Development of a Secondary Electron Emission Gun and Its Application to VOC Treatment

Author

Japanese:	加藤大輔, 杉原良, 清水政志, 渡辺正人, 堀田栄喜.
English:	Daisuke Kato, Ryo Sugihara, Nasashi Shimizu, Masato Watanabe, Eiki Hotta.

Language

English

Journal/Book name

Japanese:	第27回プラズマプロセシング研究会
English:	The 27th Symposium on Plasma Processing

Volume, Number, Page

P2-28 pp. 279-280

Published date

Feb. 2010

Publisher

Japanese:	応用物理学会プラズマエレクトロニクス分科会
English:	Division of Plasma Electronics, The Japan Society of Applied Physics

Conference name

Japanese:	第27回プラズマプロセシング研究会
English:	The 27th Symposium on Plasma Processing

Conference site

Japanese:	横浜
English:	Yokohama