Xe-based Z-pinch Discharge Produced Plasma (DPP) EUV Source for Lithograph

Publication Information

Title

Japanese:
English:	Xe-based Z-pinch Discharge Produced Plasma (DPP) EUV Source for Lithograph

Author

Japanese:	Huang Bin, 滝本泰大, 渡邊正人, 堀田栄喜.
English:	Bin Huang, Yasuhiro Takimoto, Masato watanabe, Eiki Hotta.

Language

English

Journal/Book name

Japanese:
English:	The papers of Technical Meeting on Pulsed Power Technology

Volume, Number, Page

PPT-10-23 pp. 15-18

Published date

Feb. 2010

Publisher

Japanese:
English:	IEE Japan

Conference name

Japanese:
English:	Technical Meeting on Pulsed Power Technology

Conference site

Japanese:
English:	Tokyo