Photocatalytic machining of organic molecular layer on a Si wafer surface by use of a porous TiO2 micro wire

Publication Information

Title

Japanese:
English:	Photocatalytic machining of organic molecular layer on a Si wafer surface by use of a porous TiO2 micro wire

Author

Japanese:	曽根良明, 大垣武, 岸哲生, 西尾圭史, 松本睦良, 安盛敦雄.
English:	Y. Sone, T. Ohgaki, T. Kishi, K. Nishio, M. Matsumoto, A. Yasumori.

Language

English

Journal/Book name

Japanese:
English:	J. Ceram. Soc. Jpn

Volume, Number, Page

Vol. 116 pp. 341-344

Published date

2008

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: