623 熱硬化性樹脂を用いた高解像度マイクロリソグラフィーの数値解析

Publication Information

Title

Japanese:	623 熱硬化性樹脂を用いた高解像度マイクロリソグラフィーの数値解析
English:	Numerical Analysis of Thermo Regist Enhanced Optical Lithography

Author

Japanese:	天谷賢治.
English:	KENJI AMAYA.

Language

Japanese

Journal/Book name

Japanese:	計算力学講演会講演論文集
English:	The Computational Mechanics Conference

Volume, Number, Page

Vol. 2000 No. 13 pp. 653-654

Published date

2000

Publisher

Japanese:	社団法人日本機械学会
English:	The Japan Society of Mechanical Engineers

Conference name

Japanese:
English:

Conference site

Japanese:	1348026X
English:

Official URL