243 応力波を利用した多層膜の膜厚と膜物性の同時同定(OS09-2 逆問題解析手法の開発と最新応用(2))(OS09 逆問題解析手法の開発と最新応用)

Publication Information

Title

Japanese:	243 応力波を利用した多層膜の膜厚と膜物性の同時同定(OS09-2 逆問題解析手法の開発と最新応用(2))(OS09 逆問題解析手法の開発と最新応用)
English:	243 Idetification of thickness and properties for multi-layered films by using stress wave

Author

Japanese:	天谷賢治.
English:	KENJI AMAYA.

Language

Japanese

Journal/Book name

Japanese:	計算力学講演会講演論文集
English:	The Computational Mechanics Conference

Volume, Number, Page

Vol. 2001 No. 14 pp. 209-210

Published date

2001

Publisher

Japanese:	社団法人日本機械学会
English:	The Japan Society of Mechanical Engineers

Conference name

Japanese:
English:

Conference site

Japanese:	1348026X
English:

Official URL