磁気センサを用いたLSIめっき電流の測定法

Publication Information

Title

Japanese:	磁気センサを用いたLSIめっき電流の測定法
English:	Measurement Method of Plating Current for LSI Wafer by Using Magnetic Sensors

Author

Japanese:	天谷賢治.
English:	KENJI AMAYA.

Language

Japanese

Journal/Book name

Japanese:	日本機械学會論文集. A編
English:	Transactions of the Japan Society of Mechanical Engineers. A

Volume, Number, Page

Vol. 73 No. 730 pp. 709-715

Published date

2007

Publisher

Japanese:	社団法人日本機械学会
English:	The Japan Society of Mechanical Engineers

Conference name

Japanese:
English:

Conference site

Japanese:	3875008
English:

Official URL

DOI