槽内電位逆解析による電気銅めっき電流密度推定法とその検証実験

Publication Information

Title

Japanese:	槽内電位逆解析による電気銅めっき電流密度推定法とその検証実験
English:	An Estimation Method of Copper Electroplating Current Densities by Inverse Analysis of Electric Potentials in Cells and Its Experimental Verification

Author

Japanese:	天谷賢治.
English:	KENJI AMAYA.

Language

Japanese

Journal/Book name

Japanese:	日本機械学會論文集. A編
English:	Transactions of the Japan Society of Mechanical Engineers. A

Volume, Number, Page

Vol. 75 No. 757 pp. 1239-1246

Published date

2009

Publisher

Japanese:	社団法人日本機械学会
English:	The Japan Society of Mechanical Engineers

Conference name

Japanese:
English:

Conference site

Japanese:	3875008
English:

Official URL