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Title
Japanese:超精密加工におけるインプロセス計測 
English:In-Process Measurement in Ultraprecision Machining 
Author
Japanese: 吉岡勇人, 新野秀憲.  
English: Hayato Yoshioka, HIDENORI SHINNO.  
Language Japanese 
Journal/Book name
Japanese:機械技術 
English:Mechanical Engineering 
Volume, Number, Page Vol. 58    No. 4    pp. 28-31
Published date Apr. 2010 
Publisher
Japanese:日刊工業新聞社 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

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