酸素拡散と熱伝導による非晶質シリカ薄膜の構造の研究

Publication Information

Title

Japanese:	酸素拡散と熱伝導による非晶質シリカ薄膜の構造の研究
English:

Author

Japanese:	須佐匡裕.
English:	Masahiro Susa.

Type

Type:	Thesis (Ph.D.)
Country:	Japan

Language

Japanese

Organization name

Tokyo Institute of Technology

Report number

乙第2095号

Conferred date

1990/09/30

Judge