広域ナノパターンジェネレータ（ANGEL)の開発

Publication Information

Title

Japanese:	広域ナノパターンジェネレータ（ANGEL)の開発
English:	A Newly Developed Advanced Nano-Pattern Generator with Large Work Area

Author

Japanese:	新野秀憲, 吉岡勇人.
English:	Hidenori SHINNO, Hayato YOSHIOKA.

Language

Japanese

Journal/Book name

Japanese:	機械技術
English:	Mechanical Engineering

Volume, Number, Page

Vol. 58 No. 5 pp. 18-22

Published date

May 2010

Publisher

Japanese:	日刊工業新聞社
English:	Nikkan Kogyo

Conference name

Japanese:
English:

Conference site

Japanese:
English: