ナノ加工システム用超精密XY位置決めテーブル

Publication Information

Title

Japanese:	ナノ加工システム用超精密XY位置決めテーブル
English:	Ultraprecision XY positioning table for nano manufacturing systems

Author

Japanese:	吉岡勇人, 橋詰等, 新野秀憲, 進士忠彦, 佐藤海二.
English:	Hayato Yoshioka, HITOSHI HASHIZUME, HIDENORI SHINNO, TADAHIKO SHINSHI, KAIJI SATO.

Language

Japanese

Journal/Book name

Japanese:	日本機械学会第５回生産加工・工作機械部門講演会講演論文集
English:

Volume, Number, Page

No. 04-3 pp. 103-104

Published date

Nov. 2004

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: