Macroscopic Migration of Implanted Deuterium in Silicon

Publication Information

Title

Japanese:
English:	Macroscopic Migration of Implanted Deuterium in Silicon

Author

Japanese:	片渕竜也, N. Kawachi, Y. Tagishi.
English:	T. Katabuchi, N. Kawachi, Y. Tagishi.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Dec. 1998

Publisher

Japanese:
English:

Conference name

Japanese:
English:	17th Symposium on Materials Science and Engineering Research Center of Ion Beam Technology

Conference site

Japanese:
English:	Hosei University, Japan, 16-17 December 1998