A Newly Developed Three-Dimensional Profile Scanner with Nanometer Spatial Resolution

Publication Information

Title

Japanese:
English:	A Newly Developed Three-Dimensional Profile Scanner with Nanometer Spatial Resolution

Author

Japanese:	新野秀憲, 吉岡勇人, 後閑利通, 澤野宏.
English:	Hidenori SHINNO, Hayato YOSHIOKA, Toshimichi GOKAN, Hiroshi SAWANO.

Language

English

Journal/Book name

Japanese:
English:	CIRP Annals - Manufacturing Technology (International Academy of Production Engineering)

Volume, Number, Page

Vol. 59 No. 1 pp. 525-528

Published date

June 2010

Publisher

Japanese:
English:	Elsevier

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI