Radio Frequency Micro Electro Mechanical Systems Inductor Configurations for A Achieving Large Inductance Variations and High Q-factors

Publication Information

Title

Japanese:
English:	Radio Frequency Micro Electro Mechanical Systems Inductor Configurations for A Achieving Large Inductance Variations and High Q-factors

Author

Japanese:	水落裕, 天川修平, 石原昇, 益一哉.
English:	Yutaka Mizuochi, Shuhei Amakawa, Noboru Ishihara, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:	Japan Journal of Applied Physics

Volume, Number, Page

vol. 49 pp. 05FG02-1 - 05FG02-3

Published date

May 2010

Publisher

Japanese:
English:	Japan Journal of Applied Physics

Conference name

Japanese:
English:	Japan Journal of Applied Physics

Conference site

Japanese:
English: