Interface and electrical properties of La-silicate for direct contact of high-k with silicon | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Interface and electrical properties of La-silicate for direct contact of high-k with silicon

Author

Language

Others

Journal/Book name

Japanese:
English:	Solid-State Electronics

Volume, Number, Page

Vol. 54 pp. 715-719

Published date

June 2010

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI

https://doi.org/10.1016/j.sse.2010.03.005

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