Sub-Nanometer Positioning with a High Resolution Laser Interferometer

Publication Information

Title

Japanese:
English:	Sub-Nanometer Positioning with a High Resolution Laser Interferometer

Author

Japanese:	吉岡勇人, 黒山翔太, 澤野宏, 新野秀憲.
English:	Hayato YOSHIOKA, Shota Kuroyama, Hiroshi SAWANO, Hidenori SHINNO.

Language

English

Journal/Book name

Japanese:
English:	Proceedings of the euspen International Conference

Volume, Number, Page

Vol. 1 pp. 404-407

Published date

June 2010

Publisher

Japanese:
English:

Conference name

Japanese:
English:	euspen International Conference

Conference site

Japanese:
English:	Delft, Netherlands

Official URL