Stabilization on Fabrication of GaInAsP/InP Membrane Structure on SOI waveguide by Surface Activated Bonding

Publication Information

Title

Japanese:
English:	Stabilization on Fabrication of GaInAsP/InP Membrane Structure on SOI waveguide by Surface Activated Bonding

Author

Japanese:	長部亮, 奥村忠嗣, 近藤志文, 西山伸彦, 荒井滋久.
English:	Ryo Osabe, Tadashi Okumura, Simon Kondo, Nobuhiko Nishiyama, Shigehisa Arai.

Language

English

Journal/Book name

Japanese:
English:	The 37th International Symposium on Compound Semiconductors (ISCS 2010).

Volume, Number, Page

Vol. Kagawa, Japan No. FrP23

Published date

May 2010

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: