Home >

news Help

Publication Information


Title
Japanese:3次元構造上に形成したHfON薄膜の側壁部膜質の評価 
English: 
Author
Japanese: 佐野貴洋, 大見俊一郎.  
English: Takahiro Sano, Shun-ichiro OHMI.  
Language Japanese 
Journal/Book name
Japanese:春季第56回応用物理学関係連合講演会予稿集 
English: 
Volume, Number, Page         pp. 850
Published date Mar. 2009 
Publisher
Japanese:応用物理学会 
English: 
Conference name
Japanese:春季第56回応用物理学関係連合講演会 
English: 
Conference site
Japanese:筑波大学 
English: 

©2007 Tokyo Institute of Technology All rights reserved.