Japanese
Home
Search
Horizontal Search
Publication Search
( Advanced Search )
Patent Search
( Advanced Search )
Research Highlight Search
( Advanced Search )
Researcher Search
Search by Organization
Support
FAQ
T2R2 User Registration
Doctoral thesis registration
Support/Contact
About T2R2
What's T2R2?
Operation Guidance
Leaflets
About file disclosure
Related Links
Tokyo Tech
STAR Search
NII IR Program
Home
>
Help
Publication Information
Title
Japanese:
3次元構造上に形成したHfON薄膜の側壁部膜質の評価
English:
Author
Japanese:
佐野貴洋
,
大見俊一郎
.
English:
Takahiro Sano
,
Shun-ichiro OHMI
.
Language
Japanese
Journal/Book name
Japanese:
春季第56回応用物理学関係連合講演会予稿集
English:
Volume, Number, Page
pp. 850
Published date
Mar. 2009
Publisher
Japanese:
応用物理学会
English:
Conference name
Japanese:
春季第56回応用物理学関係連合講演会
English:
Conference site
Japanese:
筑波大学
English:
©2007
Tokyo Institute of Technology All rights reserved.