R&amp;D of EUV and SXR Light Sources at Tokyo Institute of Technology

Publication Information

Title

Japanese:
English:	R&D of EUV and SXR Light Sources at Tokyo Institute of Technology

Author

Japanese:	堀田栄喜, 酒井雄祐, ｽﾞｷｭｼ, 石塚裕也, 滝本泰大, Huang Bin, 渡邊正人.
English:	Eiki Hotta, Yusuke Sakai, Zhu Qiushi, Yuya Ishizuka, Yasuhiro Takimoto, Huang Bin, Masato Watanabe.

Language

English

Journal/Book name

Japanese:
English:	2010 Academic Symposium on Optoelectronics and Microelectronics Technology and the 10th Chinese-Russian Symposium on Laser Physics and Laser Technologies

Volume, Number, Page

Published date

July 2010

Publisher

Japanese:
English:	Harbin Institute of Technology

Conference name

Japanese:
English:	2010 Academic Symposium on Optoelectronics and Microelectronics Technology and the 10th Chinese-Russian Symposium on Laser Physics and Laser Technologies

Conference site

Japanese:
English:	Harbin, China