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Title
Japanese:集積化MEMSのRF CMOSへの期待 
English: 
Author
Japanese: 益 一哉.  
English: Kazuya Masu.  
Language Japanese 
Journal/Book name
Japanese:信学技報（集積回路研究会／シリコン材料・デバイス研究会） 
English: 
Volume, Number, Page ICD2008-54        pp. 95-96
Published date July 2008 
Publisher
Japanese:信学技報（集積回路研究会／シリコン材料・デバイス研究会） 
English: 
Conference name
Japanese:信学技報（集積回路研究会／シリコン材料・デバイス研究会） 
English: 
Conference site
Japanese: 
English: 

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